OTHER UNITS FOR REPAIR LIST:

GMW-25A RF Generator, 13.56Mhz 0190-36308
LAM / ENI RF Generator, 27.1 Mhz 660-110686-112
LAM / ENI RF Generator, 13.56Mhz 853-014637-502
Matrix / ENI RF Generator, 13.56Mhz 0995-11501X
MRC / ENI RF Generator, 13.56Mhz ACG-10B
Novellus / ENI RF Generator, 13.56Mhz 27-00073-00R
Novellus / ENI RF Generator, 13.56Mhz 27-00096-00
Novellus / ENI RF Generator, 13.56Mhz 27-00157-00
Novellus / ENI RF Generator, 13.56Mhz 27-00196-00
Novellus / ENI RF Generator, 13.56Mhz 27-07712-00
Novellus / ENI RF Generator, 13.56Mhz 27-10341-00
Novellus / Trazar / Regen Solutions / Conteq Automatch, 13.56Mhz 27-045983-00
Ulvac Automatch, 13.56Mhz MHW-5-01M3
Ulvac RF Generator, 13.56Mhz OEM-6B-01M3
Varian / RFPP RF Generator, Low Frequency G19-10074-00

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